ROTARY SILICON WAFER CLEANING APPARATUS

Details for Australian Patent Application No. 2003264411 (hide)

Owner FUJIKIN INCORPORATED OHMI, Tadahiro

Inventors SHIRAI, Yasuyuki; MINAMI, Yukio; MORIMOTO, Akihiro; KAWADA, Koji; IKEDA, Nobukazu; FUJITA, Takumi; OHMI, Tadahiro

Pub. Number AU-A-2003264411

PCT Number PCT/JP03/11667

PCT Pub. Number WO2004/036637

Priority 2002-276818 24.09.02 JP

Filing date 11 September 2003

Wipo publication date 4 May 2004

International Classifications

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

11 December 2003 Complete Application Filed

  Priority application(s): 2002-276818 24.09.02 JP

10 June 2004 Application Open to Public Inspection

  Published as AU-A-2003264411

9 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

25 August 2005 Corrigenda

  Applications OPI - Name Index Under the name FUJIKIN INCORPORATED; OHMI, Tadahiro, Application No. 2003264411, under INID (71) correct the name to read FUJIKIN INCORPORATED; OHMI, Tadahiro; PRE-TECH CO., LTD.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003264412-MELANIN EXTINGUISHER

2003264410-ELECTROLESS-PLATING SOLUTION, METHOD OF ELECTROLESS PLATING WITH THE SAME, AND OBJECT PLATED BY ELECTROLESS PLATING