MARK POSITION DETECTION DEVICE, MARK POSITION DETECTION METHOD, SUPERIMPOSING MEASUREMENT DEVICE, AND SUPERIMPOSING MEASUREMENT METHOD

Details for Australian Patent Application No. 2003264338 (hide)

Owner NIKON CORPORATION

Inventors AOKI, Hiroshi

Pub. Number AU-A-2003264338

PCT Number PCT/JP03/10582

PCT Pub. Number WO2004/019389

Priority 2002-242049 22.08.02 JP

Filing date 21 August 2003

Wipo publication date 11 March 2004

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G01B 011/00 Measuring arrangements characterised by the use of optical means

G03F 009/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Event Publications

11 December 2003 Complete Application Filed

  Priority application(s): 2002-242049 22.08.02 JP

22 April 2004 Application Open to Public Inspection

  Published as AU-A-2003264338

9 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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