Method and device for producing extreme ultraviolet radiation or soft x-ray radiation

Details for Australian Patent Application No. 2003264266 (hide)

Owner Commissariat Energie Atomique

Inventors Schmidt, Martin; Lebert, Rainer-Helmut; Stamm, Uwe

Pub. Number AU-A-2003264266

PCT Number PCT/EP03/09842

PCT Pub. Number WO2005/004555

Filing date 27 June 2003

Wipo publication date 21 January 2005

International Classifications

H05G 002/00 Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma

Event Publications

11 December 2003 Complete Application Filed

18 August 2005 Application Open to Public Inspection

  Published as AU-A-2003264266

16 March 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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