DEVICE FOR ETCHING SEMICONDUCTORS WITH A LARGE SURFACE AREA

Details for Australian Patent Application No. 2003264239 (hide)

Owner CHRISTIAN-ALBRECHTSUNIVERSITAT ZU KIEL

Inventors CHRISTOPHERSEN, Marc; BAHR, Jorg; CARSTENSEN, Jurgen; STEEN, Kay; POPKIROV, Georgi; FOLL, Helmut

Pub. Number AU-A-2003264239

PCT Number PCT/DE03/02491

PCT Pub. Number WO2004/017384

Priority 102 35 020.5 31.07.02 DE

Filing date 24 July 2003

Wipo publication date 3 March 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/3063 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

11 December 2003 Complete Application Filed

  Priority application(s): 102 35 020.5 31.07.02 DE

22 April 2004 Application Open to Public Inspection

  Published as AU-A-2003264239

9 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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