A SYSTEM AND METHOD FOR DETERMINING A CROSS SECTIONAL FEATURE OF A STRUCTURAL ELEMENT HAVING A SUB-MICRON CROSS SECTION

Details for Australian Patent Application No. 2003263776 (hide)

Owner SENDER, Benzion DROR, Ophir TAM, Aviram MENADEVA, Ovadya KRIS, Roman APPLIED MATERIALS, INC.

International Classifications

Event Publications

11 December 2003 Complete Application Filed

Priority application(s): 60/394,864 11.07.02 US

18 March 2004 Application Open to Public Inspection

Published as AU-A-2003263776

9 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

25 August 2005 Corrigenda

Applications OPI - Name Index Under the name SENDER, Benzion; DROR, Ophir; TAM, Aviram; MENADEVA, Ovadya; KRIS, Roman; APPLIED MATERIALS, INC., Application No. 2003263776, under INID (71) correct the name to read SENDER, Benzion; DROR, Ophir; APPLIED MATERIALS ISRAEL, LTD; TAM, Aviram; MENADEVA, Ovadya; KRIS, Roman; APPLIED MATERIALS, INC.

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