METHOD FOR DEPOSITING NITRIDE FILM USING CHEMICAL VAPOR DEPOSITION APPARATUS OF SINGLE CHAMBER TYPE

Details for Australian Patent Application No. 2003263633 (hide)

Owner EUGENE TECHNOLOGY CO., LTD.

Inventors UM, Pyung-Yong

Pub. Number AU-A-2003263633

PCT Number PCT/KR03/01915

PCT Pub. Number WO2004/030059

Priority 10-2002-0059372 30.09.02 KR

Filing date 19 September 2003

Wipo publication date 19 April 2004

International Classifications

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

11 December 2003 Complete Application Filed

  Priority application(s): 10-2002-0059372 30.09.02 KR

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003263633

16 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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