FABRICATION SYSTEM AND MANUFACTURING METHOD OF LIGHT EMITTING DEVICE

Details for Australian Patent Application No. 2003263609 (hide)

Owner SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

Inventors YAMAZAKI, Shunpei; KUWABARA, Hideaki; MURAKAMI, Masakazu

Pub. Number AU-A-2003263609

PCT Number PCT/JP03/11983

PCT Pub. Number WO2004/028214

Priority 2002-276216 20.09.02 JP

Filing date 19 September 2003

Wipo publication date 8 April 2004

International Classifications

H05B 033/10 Electroluminescent light sources - Apparatus or processes specially adapted to the manufacture of electroluminescent light sources

H05B 033/14 Electroluminescent light sources - characterised by the chemical or physical composition or the arrangement of the electroluminescent material

C23C 014/24 Coating by vacuum evaporation, by sputtering or by ion implantation - Vacuum evaporation

Event Publications

11 December 2003 Complete Application Filed

  Priority application(s): 2002-276216 20.09.02 JP

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003263609

9 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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