SURFACE PROCESSING METHOD

Details for Australian Patent Application No. 2003263606 (hide)

Owner TOKYO UNIVERSITY OF SCIENCE

Inventors TANIGUCHI, Jun

Pub. Number AU-A-2003263606

PCT Number PCT/JP03/11903

PCT Pub. Number WO2004/027843

Priority 2002-271337 18.09.02 JP; 60/412,457 19.09.02 US; 2003-072318 17.03.03 JP

Filing date 18 September 2003

Wipo publication date 8 April 2004

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/004 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Photosensitive materials

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 005/18 Optical elements other than lenses - Diffracting gratings

Event Publications

11 December 2003 Complete Application Filed

  Priority application(s): 2002-271337 18.09.02 JP; 60/412,457 19.09.02 US; 2003-072318 17.03.03 JP

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003263606

9 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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