GAS TUBE END CAP FOR A MICROWAVE PLASMA GENERATOR

Details for Australian Patent Application No. 2003263048 (hide)

Owner AXCELIS TECHNOLOGIES, INC.

Inventors WANG, Albert

Pub. Number AU-A-2003263048

PCT Number PCT/US03/27395

PCT Pub. Number WO2004/021392

Priority 60/408,013 30.08.02 US

Filing date 29 August 2003

Wipo publication date 19 March 2004

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

11 December 2003 Complete Application Filed

  Priority application(s): 60/408,013 30.08.02 US

6 May 2004 Application Open to Public Inspection

  Published as AU-A-2003263048

2 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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