A HYBRID BEAM DEPOSITION SYSTEM AND METHODS FOR FABRICATING METAL OXIDE ZNO FILMS, PTYPE ZNO FILMS, AND ZNO-BASED II-VI COMPOUND SEMICONDUCTOR DEVICES

Details for Australian Patent Application No. 2003262981 (hide)

Owner MOXTRONICS, INC.

Inventors WHITE, Henry, W.; RYU, Yungryel; LEE, Tae-Seok

Pub. Number AU-A-2003262981

PCT Number PCT/US03/27143

PCT Pub. Number WO2004/020686

Priority 60/406,500 28.08.02 US

Filing date 27 August 2003

Wipo publication date 19 March 2004

International Classifications

C23C 014/00 Coating by vacuum evaporation, by sputtering or by ion implantation

Event Publications

11 December 2003 Complete Application Filed

  Priority application(s): 60/406,500 28.08.02 US

6 May 2004 Application Open to Public Inspection

  Published as AU-A-2003262981

2 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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