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Details for Australian Patent Application No. 2003262801 (hide)

Owner CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE

Inventors WEISS, Francois Florent; SUPARDI, Zainul; ODIER, Philippe

Pub. Number AU-A-2003262801

PCT Number PCT/FR03/01254

PCT Pub. Number WO2003/091475

Priority 02/05217 25.04.02 FR

Filing date 18 April 2003

Wipo publication date 10 November 2003

International Classifications

C23C 016/40 Chemical deposition or plating by decomposition - Oxides

H01L 039/24 Devices using superconductivity or hyperconductivity - Processes or apparatus specially adapted for the manufacture or treatment of devices provided for in group or of parts thereof

C23C 016/448 Chemical deposition or plating by decomposition - characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials

C23C 016/56 Chemical deposition or plating by decomposition - After-treatment

Event Publications

11 December 2003 Complete Application Filed

  Priority application(s): 02/05217 25.04.02 FR

18 December 2003 Application Open to Public Inspection

  Published as AU-A-2003262801

2 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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