APPARATUS AND METHOD FOR USE OF OPTICAL SYSTEM WITH PLASMA PROC ESSING SYSTEM

Details for Australian Patent Application No. 2003262768 (hide)

International Classifications

Event Publications

11 December 2003 Complete Application Filed

Priority application(s): 60/414,348 30.09.02 US

27 May 2004 Application Open to Public Inspection

Published as AU-A-2003262768

16 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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