COMPOSITION FOR FORMING SILICON FILM AND METHOD FOR FORMING SILICON FILM

Details for Australian Patent Application No. 2003262236 (hide)

Owner JSR CORPORATION

Inventors MATSUKI, Yasuo; IWASAWA, Haruo; KATO, Hitoshi

Pub. Number AU-A-2003262236

PCT Number PCT/JP03/10380

PCT Pub. Number WO2004/019393

Priority 2002-243004 23.08.02 JP; 2002-376019 26.12.02 JP

Filing date 15 August 2003

Wipo publication date 11 March 2004

International Classifications

H01L 021/208 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 November 2003 Complete Application Filed

  Priority application(s): 2002-243004 23.08.02 JP; 2002-376019 26.12.02 JP

22 April 2004 Application Open to Public Inspection

  Published as AU-A-2003262236

2 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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