POLISHING AGENT COMPOSITION FOR INSULATING FILM FOR SEMICONDUCTOR INTEGRATED CIRCUIT AND METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT

Details for Australian Patent Application No. 2003261966 (hide)

Owner ASAHI GLASS COMPANY, LIMITED

Inventors KAMITANI, Hiroyuki; HAYASHI, Atsushi; TSUGITA, Katsuyuki; SHINMARU, Sachie

Pub. Number AU-A-2003261966

PCT Number PCT/JP03/11368

PCT Pub. Number WO2004/023539

Priority 2002-261964 06.09.02 JP; 2002-261965 06.09.02 JP

Filing date 5 September 2003

Wipo publication date 29 March 2004

International Classifications

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 November 2003 Complete Application Filed

  Priority application(s): 2002-261964 06.09.02 JP; 2002-261965 06.09.02 JP

13 May 2004 Application Open to Public Inspection

  Published as AU-A-2003261966

2 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

25 August 2005 Corrigenda

  Applications OPI - Name Index Under the name ASAHI GLASS COMPANY, LIMITED, Application No. 2003261966, under INID (71) correct the name to read SEIMI CHEMICAL CO., LTD.; ASAHI GLASS COMPANY, LIMITED

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