PATTERN INSPECTION METHOD AND INSPECTION DEVICE THEREFOR

Details for Australian Patent Application No. 2003261884 (hide)

Owner HAMAMATSU FOUNDATION FOR SCIENCE AND TECHNOLOGY PROMOTION

Inventors OKAMOTO, Naomichi

Pub. Number AU-A-2003261884

PCT Number PCT/JP03/11187

PCT Pub. Number WO2004/023122

Priority 2002-258204 03.09.02 JP

Filing date 2 September 2003

Wipo publication date 29 March 2004

International Classifications

G01N 021/956 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

H05K 003/00 Apparatus or processes for manufacturing printed circuits

G01N 025/72 Investigating or analysing materials by the use of thermal means - Investigating presence of flaws

Event Publications

27 November 2003 Complete Application Filed

  Priority application(s): 2002-258204 03.09.02 JP

13 May 2004 Application Open to Public Inspection

  Published as AU-A-2003261884

2 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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