SEMICONDUCTOR DEVICE MANUFACTURING METHOD

Details for Australian Patent Application No. 2003261857 (hide)

Owner RENESAS TECHNOLOGY CORP.

Inventors SASAKI, Toshio; SUZUKI, Hiromichi; ITO, Fujio

Pub. Number AU-A-2003261857

PCT Number PCT/JP03/11121

PCT Pub. Number WO2005/024933

Filing date 29 August 2003

Wipo publication date 29 March 2005

International Classifications

H01L 021/52 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 023/50 Details of semiconductor or other solid state devices

Event Publications

27 November 2003 Complete Application Filed

5 May 2005 Application Open to Public Inspection

  Published as AU-A-2003261857

18 May 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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