PROBE FOR TESTING ELECTRIC CONDUCTION

Details for Australian Patent Application No. 2003261854 (hide)

Owner KABUSHIKI KAISHA NIHON MICRONICS

Inventors MIURA, Kiyotoshi; MIYAGI, Yuji; AKAHIRA, Akihisa

Pub. Number AU-A-2003261854

PCT Number PCT/JP03/11117

PCT Pub. Number WO2004/102207

Priority 2003-134753 13.05.03 JP

Filing date 29 August 2003

Wipo publication date 3 December 2004

International Classifications

G01R 001/067 Details of instruments or arrangements of the types included in groups and - Measuring probes

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

27 November 2003 Complete Application Filed

  Priority application(s): 2003-134753 13.05.03 JP

13 January 2005 Application Open to Public Inspection

  Published as AU-A-2003261854

2 February 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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