UNITED METHOD AND APPARATUS TO PREVENT LATERAL OXIDATION IN A TRANSISTOR UTILIZING AN ULTRA THIN OXYGEN-DIFFUSION BARRIER

Details for Australian Patent Application No. 2003261334 (hide)

Owner INTEL CORPORATION

Inventors ARGHAVANI, Reza; STOKLEY, Patricia; CHAU, Robert

Pub. Number AU-A-2003261334

PCT Number PCT/US03/24108

PCT Pub. Number WO2004/017393

Priority 10/219,726 14.08.02 US

Filing date 31 July 2003

Wipo publication date 3 March 2004

International Classifications

H01L 021/28 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 029/49 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

Event Publications

20 November 2003 Complete Application Filed

  Priority application(s): 10/219,726 14.08.02 US

22 April 2004 Application Open to Public Inspection

  Published as AU-A-2003261334

26 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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