METHOD FOR ETCHING A PATTERNED SILICONE LAYYER

Details for Australian Patent Application No. 2003261279 (hide)

Owner DOW CORNING CORPORATION

Inventors BECKER, Gregory; GARDNER, Geoffrey; HARKNESS, Brian

Pub. Number AU-A-2003261279

PCT Number PCT/US03/23601

PCT Pub. Number WO2005/017627

Filing date 28 July 2003

Wipo publication date 7 March 2005

International Classifications

G03F 007/42 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Stripping or agents therefor

G03F 007/075 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Silicon-containing compounds

Event Publications

20 November 2003 Complete Application Filed

14 April 2005 Application Open to Public Inspection

  Published as AU-A-2003261279

13 April 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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