SEMICONDUCTOR SUBSTRATE DAMAGE PROTECTION SYSTEM

Details for Australian Patent Application No. 2003261179 (hide)

Owner APPLIED MATERIALS, INC.

Inventors CHO, Sungmin; REIMER, Peter; SEIDL, Vincent

Pub. Number AU-A-2003261179

PCT Number PCT/US03/22367

PCT Pub. Number WO2004/008505

Priority 10/198,688 17.07.02 US

Filing date 17 July 2003

Wipo publication date 2 February 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 November 2003 Complete Application Filed

  Priority application(s): 10/198,688 17.07.02 US

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003261179

26 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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