DEVICE WITH FOIL CORRECTOR FOR ELECTRON OPTICAL ABERRATIONS AT LOW ENERGY

Details for Australian Patent Application No. 2003261023 (hide)

Owner TECHNISCHE UNIVERSITEIT DELFT

Inventors KRUIT, Pieter; VAN AKEN, Rogier, Herman

Pub. Number AU-A-2003261023

PCT Number PCT/NL03/00612

PCT Pub. Number WO2004/021391

Priority 60/407,012 30.08.02 US

Filing date 1 September 2003

Wipo publication date 19 March 2004

International Classifications

H01J 037/153 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

H01J 037/05 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

H01J 037/12 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

20 November 2003 Complete Application Filed

  Priority application(s): 60/407,012 30.08.02 US

6 May 2004 Application Open to Public Inspection

  Published as AU-A-2003261023

26 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

25 August 2005 Corrigenda

  Applications OPI - Name Index Under the name TECHNISCHE UNIVERSITEIT DELFT, Application No. 2003261023, under INID (71) correct the name to read STICHTING FUNDEMENTEEL ONDERZOEK DER MATERIE (FOM); TECHNISCHE UNIVERSITEIT DELFT

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