OPTICAL REPRODUCTION SYSTEM, IN PARTICULAR CATADIOPTRIC REDUCTION LENS

Details for Australian Patent Application No. 2003260438 (hide)

Owner CARL ZEISS SMT AG

Inventors ZACZEK, Christoph; MECKING, Birgit; ULLMANN, Jens; WAGNER, Christian

Pub. Number AU-A-2003260438

PCT Number PCT/EP03/09253

PCT Pub. Number WO2004/025370

Priority 102 40 598.0 27.08.02 DE

Filing date 21 August 2003

Wipo publication date 30 April 2004

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 017/08 Systems with reflecting surfaces, with or without refracting elements - Catadioptric systems

G02B 005/08 Optical elements other than lenses - Mirrors

Event Publications

20 November 2003 Complete Application Filed

  Priority application(s): 102 40 598.0 27.08.02 DE

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003260438

26 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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