ATOMIC LAYER DEPOSITION OF CMOS GATES

Details for Australian Patent Application No. 2003260042 (hide)

Owner MICRON TECHNOLOGY, INC.

Inventors FORBES, Leonard; AHN, Kie, Y.

Pub. Number AU-A-2003260042

PCT Number PCT/US03/26487

PCT Pub. Number WO2004/019394

Priority 10/225,605 22.08.02 US

Filing date 21 August 2003

Wipo publication date 11 March 2004

International Classifications

H01L 021/28 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/8238 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 029/49 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

H01L 021/8234 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 November 2003 Complete Application Filed

  Priority application(s): 10/225,605 22.08.02 US

22 April 2004 Application Open to Public Inspection

  Published as AU-A-2003260042

26 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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