OPTICAL PATH IMPROVEMENT, FOCUS LENGTH CHANGE COMPENSATION, AND STRAY LIGHT REDUCTION FOR TEMPERATURE MEASUREMENT SYSTEM OF RTP TOOL

Details for Australian Patent Application No. 2003259989 (hide)

Owner AXCELIS TECHNOLOGIES, INC.

Inventors BROWN, Douglas; MEADOWS, Robert, David; TAO, David; KOCH, Mathias

Pub. Number AU-A-2003259989

PCT Number PCT/US03/26278

PCT Pub. Number WO2004/019386

Priority 10/225,590 22.08.02 US

Filing date 21 August 2003

Wipo publication date 11 March 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 November 2003 Complete Application Filed

  Priority application(s): 10/225,590 22.08.02 US

22 April 2004 Application Open to Public Inspection

  Published as AU-A-2003259989

26 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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