MULTI-COLUMN MULTI-BEAM INSPECTION SYSTEM

Details for Australian Patent Application No. 2003259857 (hide)

Owner MULTIBEAM SYSTEMS, INC.

Inventors PARKER, William, N.; MILLER, Daniel, S.

Pub. Number AU-A-2003259857

PCT Number PCT/US03/25635

PCT Pub. Number WO2004/017355

Priority 10/222,759 15.08.02 US

Filing date 13 August 2003

Wipo publication date 3 March 2004

International Classifications

H01J 037/28 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - with scanning beams

Event Publications

20 November 2003 Complete Application Filed

  Priority application(s): 10/222,759 15.08.02 US

22 April 2004 Application Open to Public Inspection

  Published as AU-A-2003259857

26 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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