FLUORINATED POLYMERS HAVING POLYCYCLIC GROUPS WITH FUSED 4-MEMBERED CARBOCYCLIC RINGS, USEFUL AS PHOTORESISTS, AND PROCESSES FOR MICROLITHOGRAPHY

Details for Australian Patent Application No. 2003259727 (hide)

Owner E. I. DU PONT DE NEMOURS AND COMPANY

Inventors FEIRING, Andrew, E.; SCHADT, Frank, L., III; PETROV, Viacheslav Alexandrovich; SMART, Bruce, Edmund; FARNHAM, William, Brown

Pub. Number AU-A-2003259727

PCT Number PCT/US03/25022

PCT Pub. Number WO2004/014964

Priority 60/402,350 09.08.02 US; 60/440,504 16.01.03 US

Filing date 8 August 2003

Wipo publication date 25 February 2004

International Classifications

C08F 014/18 Homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen

G03C 001/73 Photosensitive materials - containing organic compounds

Event Publications

20 November 2003 Complete Application Filed

  Priority application(s): 60/402,350 09.08.02 US; 60/440,504 16.01.03 US

8 April 2004 Application Open to Public Inspection

  Published as AU-A-2003259727

26 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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