HIGH THROUGHPUT INSPECTION SYSTEM AND METHOD FOR GENERATING TRANSMITTED AND/OR REFLECTED IMAGES

Details for Australian Patent Application No. 2003259708 (hide)

Owner APPLIED MATERIALS, INC.

Inventors ELYASAF, Emanuel; FELDMAN, Haim; YALOV, Simon; LAHAT, Eitan

Pub. Number AU-A-2003259708

PCT Number PCT/US03/24946

PCT Pub. Number WO2004/015404

Priority 10/215,972 08.08.02 US

Filing date 6 August 2003

Wipo publication date 25 February 2004

International Classifications

G01N 021/956 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

G01N 021/21 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Polarisation-affecting properties

G01N 021/88 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Investigating the presence of flaws, defects or contamination

Event Publications

20 November 2003 Complete Application Filed

  Priority application(s): 10/215,972 08.08.02 US

8 April 2004 Application Open to Public Inspection

  Published as AU-A-2003259708

26 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

25 August 2005 Corrigenda

  Applications OPI - Name Index Under the name APPLIED MATERIALS, INC., Application No. 2003259708, under INID (71) correct the name to read APPLIED MATERIALS ISRAEL, LTD; APPLIED MATERIALS, INC.

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