MANIPULATING DEVICE FOR PHOTOMASKS THAT PROVIDES POSSIBILITIES FOR CLEANING AND INSPECTION OF PHOTOMASKS

Details for Australian Patent Application No. 2003259273 (hide)

Event Publications

13 November 2003 Complete Application Filed

Priority application(s): 1330/02 29.07.02 CH

25 March 2004 Application Open to Public Inspection

Published as AU-A-2003259273

26 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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