METHOD FOR ADJUSTING VOLTAGE ON A POWERED FARADAY SHIELD

Details for Australian Patent Application No. 2003259241 (hide)

Owner LAM RESEARCH CORPORATION

Inventors LOHOKARE, Shrikant, P; KUTHI, Andras; BAILEY, Andrew, D., III

Pub. Number AU-A-2003259241

PCT Number PCT/US03/23304

PCT Pub. Number WO2004/012221

Priority 10/210,239 31.07.02 US

Filing date 23 July 2003

Wipo publication date 16 February 2004

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

13 November 2003 Complete Application Filed

  Priority application(s): 10/210,239 31.07.02 US

25 March 2004 Application Open to Public Inspection

  Published as AU-A-2003259241

26 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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