IN-SITU FORMATION OF METAL INSULATOR METAL CAPACITORS CROSS REFERENCE TO RELATED APPLICATIONS

Details for Australian Patent Application No. 2003259151 (hide)

Owner ASML US, INC.

Inventors YOSHIHIDE, Senzaki

Pub. Number AU-A-2003259151

PCT Number PCT/US03/22385

PCT Pub. Number WO2004/010471

Priority 60/396,734 19.07.02 US

Filing date 18 July 2003

Wipo publication date 9 February 2004

Event Publications

13 November 2003 Complete Application Filed

  Priority application(s): 60/396,734 19.07.02 US

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003259151

26 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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