THERMAL PROCESSING SYSTEM AND CONFIGURABLE VERTICAL CHAMBER

Details for Australian Patent Application No. 2003259104 (hide)

Owner ASML US, INC.

Inventors QIU, Taiquing; KOWALSKI, Jeffrey, M.; DUBOIS, Dale, R.; NAM, Jamie, H.; WILDMAN, Craig

Pub. Number AU-A-2003259104

PCT Number PCT/US03/21575

PCT Pub. Number WO2004/008491

Priority 60/396,536 15.07.02 US; 60/428,526 22.11.02 US

Filing date 10 July 2003

Wipo publication date 2 February 2004

Event Publications

13 November 2003 Complete Application Filed

  Priority application(s): 60/396,536 15.07.02 US; 60/428,526 22.11.02 US

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003259104

26 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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