CASING FOR A PROJECTION LENS USED FOR MICROPHOTOGRAPHY PROVIDED WITH ADJUSTING SURFACE FOR MOUNTING AND ADJUSTING SAID CASING

Details for Australian Patent Application No. 2003258605 (hide)

Owner CARL ZEISS SMT AG

Inventors HOLDERER, Hubert; WEBER, Ulrich; KOHL, Alexander

Pub. Number AU-A-2003258605

PCT Number PCT/EP03/08962

PCT Pub. Number WO2004/034149

Priority 102 46 828.1 08.10.02 DE

Filing date 13 August 2003

Wipo publication date 4 May 2004

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 007/02 Mountings, adjusting means, or light-tight connections, for optical elements - for lenses

Event Publications

13 November 2003 Complete Application Filed

  Priority application(s): 102 46 828.1 08.10.02 DE

3 June 2004 Application Open to Public Inspection

  Published as AU-A-2003258605

23 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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