METHOD AND ARRAY FOR PROCESSING CARRIER MATERIALS BY MEANS OF HEAVY ION RADIATION AND SUBSEQUENT ETCHING

Details for Australian Patent Application No. 2003258471 (hide)

Owner FRACTAL AG

Inventors DANZIGER, Manfred

Pub. Number AU-A-2003258471

PCT Number PCT/DE03/02533

PCT Pub. Number WO2004/015161

Priority 102 34 614.3 24.07.02 DE

Filing date 23 July 2003

Wipo publication date 25 February 2004

International Classifications

C23C 014/02 Coating by vacuum evaporation, by sputtering or by ion implantation - Pretreatment of the material to be coated

H01G 009/04 Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices - Electrodes

B26F 001/26 Perforating

H01J 037/31 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for cutting or drilling

B29C 059/16 Surface shaping, e.g. embossing

B32B 031/00

Event Publications

13 November 2003 Complete Application Filed

  Priority application(s): 102 34 614.3 24.07.02 DE

8 April 2004 Application Open to Public Inspection

  Published as AU-A-2003258471

19 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

25 August 2005 Corrigenda

  Applications OPI - Name Index Under the name FRACTAL AG, Application No. 2003258471, under INID (71) correct the name to read FRACTAL AG; IST IONENSTRAHLTECHNOLOGIE GMBH

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