DEVICE FOR CARRYING OUT A PLASMA-ASSISTED PROCESS

Details for Australian Patent Application No. 2003258439 (hide)

Owner TETRA LAVAL HOLDINGS AND FINANCE S.A.

Inventors FAYET, Pierre; JACCOUD, Bertrand

Pub. Number AU-A-2003258439

PCT Number PCT/CH03/00610

PCT Pub. Number WO2004/031441

Priority 1653/02 03.10.02 CH

Filing date 9 September 2003

Wipo publication date 23 April 2004

International Classifications

C23C 016/509 Chemical deposition or plating by decomposition

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

13 November 2003 Complete Application Filed

  Priority application(s): 1653/02 03.10.02 CH

27 May 2004 Application Open to Public Inspection

  Published as AU-A-2003258439

23 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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