REDUCED VOLUME REACTOR

Details for Australian Patent Application No. 2003258237 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors FINK, Steven, T.

Pub. Number AU-A-2003258237

PCT Number PCT/US03/25478

PCT Pub. Number WO2004/019368

Priority 60/405,740 26.08.02 US

Filing date 14 August 2003

Wipo publication date 11 March 2004

International Classifications

H01J 037/18 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

H01J 037/20 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Means for supporting or positioning the object or the material

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

13 November 2003 Complete Application Filed

  Priority application(s): 60/405,740 26.08.02 US

22 April 2004 Application Open to Public Inspection

  Published as AU-A-2003258237

19 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003258238-METHOD FOR PROCESSING DATA BASED ON THE DATA CONTEXT

2003258236-COMPLIANT DIAPHRAGM FOR PLANAR MAGNETIC ACOUSTIC TRANSDUCERS