METHOD FOR IN-SITU MONITORING OF PATTERNED SUBSTRATE PROCESSING USING REFLECTOMETRY

Details for Australian Patent Application No. 2003258170 (hide)

Owner LAM RESEARCH CORPORATION

Inventors VENUGOPAL, Vijayakumar, C.; PERRY, Andrew, J.

Pub. Number AU-A-2003258170

PCT Number PCT/US03/25147

PCT Pub. Number WO2004/015364

Priority 60/403,213 13.08.02 US; 60/408,619 06.09.02 US; 10/286,410 01.11.02 US; 10/286,409 01.11.02 US; 10/401,118 27.03.03 US

Filing date 12 August 2003

Wipo publication date 25 February 2004

International Classifications

G01B 011/06 Measuring arrangements characterised by the use of optical means - for measuring thickness

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

13 November 2003 Complete Application Filed

  Priority application(s): 60/403,213 13.08.02 US; 60/408,619 06.09.02 US; 10/286,410 01.11.02 US; 10/286,409 01.11.02 US; 10/401,118 27.03.03 US

8 April 2004 Application Open to Public Inspection

  Published as AU-A-2003258170

19 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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