MAGNETRON PLASMA-USE MAGNETIC FIELD GENERATION DEVICE

Details for Australian Patent Application No. 2003257652 (hide)

Owner SHIN-ETSU CHEMICAL CO., LTD.

Inventors MIYATA, Koji; TEZUKA, Kazuyuki; TATESHITA, Koichi; ONO, Hiroo; NAGASEKI, Kazuya; HIMORI, Shinji

Pub. Number AU-A-2003257652

PCT Number PCT/JP03/10583

PCT Pub. Number WO2004/019398

Priority 2002-241124 21.08.02 JP; 2002-241250 21.08.02 JP; 2002-241802 22.08.02 JP; 2003-46097 24.02.03 JP

Filing date 21 August 2003

Wipo publication date 11 March 2004

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 November 2003 Complete Application Filed

  Priority application(s): 2002-241124 21.08.02 JP; 2002-241250 21.08.02 JP; 2002-241802 22.08.02 JP; 2003-46097 24.02.03 JP

22 April 2004 Application Open to Public Inspection

  Published as AU-A-2003257652

19 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

25 August 2005 Corrigenda

  Applications OPI - Name Index Under the name SHIN-ETSU CHEMICAL CO., LTD., Application No. 2003257652, under INID (71) correct the name to read SHIN-ETSU CHEMICAL CO., LTD.; TOKYO ELECTRON LIMITED

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