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Details for Australian Patent Application No. 2003257636 (hide)

Owner DAIKIN INDUSTRIES, LTD.

Inventors KEZUKA, Takehiko; ITANO, Mitsushi; KANEMURA, Takashi; NAKAMURA, Shingo; KAMIYA, Fumihiro

Pub. Number AU-A-2003257636

PCT Number PCT/JP03/10547

PCT Pub. Number WO2004/019134

Priority 2002/242392 22.08.02 JP; 2002/299657 11.10.02 JP

Filing date 21 August 2003

Wipo publication date 11 March 2004

International Classifications

G03F 007/42 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Stripping or agents therefor

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H05K 003/26 Apparatus or processes for manufacturing printed circuits - Cleaning or polishing of the conductive pattern

Event Publications

6 November 2003 Complete Application Filed

  Priority application(s): 2002/242392 22.08.02 JP; 2002/299657 11.10.02 JP

22 April 2004 Application Open to Public Inspection

  Published as AU-A-2003257636

19 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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