TEMPERATURE CONTROL METHOD AND DEVICE, AND EXPOSURE METHOD AND APPARATUS

Details for Australian Patent Application No. 2003257538 (hide)

Owner NIKON CORPORATION

Inventors ARAI, Dai; YOSHIDA, Tomoyuki

Pub. Number AU-A-2003257538

PCT Number PCT/JP03/10757

PCT Pub. Number WO2004/021418

Priority 2002-250179 29.08.02 JP

Filing date 26 August 2003

Wipo publication date 19 March 2004

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

F24F 003/00 Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment

Event Publications

6 November 2003 Complete Application Filed

  Priority application(s): 2002-250179 29.08.02 JP

6 May 2004 Application Open to Public Inspection

  Published as AU-A-2003257538

19 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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