PROCESS FOR REDUCING DISHING AND EROSION DURING CHEMICAL MECHANICAL PLANARIZATION

Details for Australian Patent Application No. 2003257147 (hide)

Owner PPG INDUSTRIES OHIO, INC.

Inventors AUGER, Robert L.; HELLRING, Stuart D.; LI, Yuzhuo

Pub. Number AU-A-2003257147

PCT Number PCT/US03/24286

PCT Pub. Number WO2004/013242

Priority 60/401,109 05.08.02 US; 10/627,775 28.07.03 US

Filing date 1 August 2003

Wipo publication date 23 February 2004

International Classifications

C09G 001/02 Polishing compositions

H01L 021/321 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B24B 001/00

Event Publications

6 November 2003 Complete Application Filed

  Priority application(s): 60/401,109 05.08.02 US; 10/627,775 28.07.03 US

1 April 2004 Application Open to Public Inspection

  Published as AU-A-2003257147

19 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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