ION SOURCE AND COAXIAL INDUCTIVE COUPLER FOR ION IMPLANTATION SYSTEM

Details for Australian Patent Application No. 2003256973 (hide)

Owner AXCELIS TECHNOLOGIES, INC.

Inventors BENVENISTE, Victor; DIVERGILIO, William

Pub. Number AU-A-2003256973

PCT Number PCT/US03/23686

PCT Pub. Number WO2004/015735

Priority 10/209,397 31.07.02 US

Filing date 29 July 2003

Wipo publication date 25 February 2004

International Classifications

H01J 037/00 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

6 November 2003 Complete Application Filed

  Priority application(s): 10/209,397 31.07.02 US

8 April 2004 Application Open to Public Inspection

  Published as AU-A-2003256973

19 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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