DUAL CHAMBER INTEGRATED PHASE SEPARATOR FOR ULTRA HIGH VACUUM SYSTEM

Details for Australian Patent Application No. 2003256949 (hide)

Owner VEECO INSTRUMENTS INC.

Inventors PRIDDY, Scott, Wayne; COLOMBO, Paul, E.

Pub. Number AU-A-2003256949

PCT Number PCT/US03/23617

PCT Pub. Number WO2004/011701

Priority 10/209,111 30.07.02 US

Filing date 29 July 2003

Wipo publication date 16 February 2004

International Classifications

C30B 023/02 Single-crystal growth from vapours - Epitaxial-layer growth

F04B 037/08 Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups

Event Publications

6 November 2003 Complete Application Filed

  Priority application(s): 10/209,111 30.07.02 US

25 March 2004 Application Open to Public Inspection

  Published as AU-A-2003256949

12 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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