CONTROLLING A MATERIAL PROCESSING TOOL AND PERFORMANCE DATA

Details for Australian Patent Application No. 2003256257 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors LAM, Hieu, A.; YUE, Hongyu

Pub. Number AU-A-2003256257

PCT Number PCT/US03/16239

PCT Pub. Number WO2004/003822

Priority 60/391,966 28.06.02 US

Filing date 27 June 2003

Wipo publication date 19 January 2004

International Classifications

G06F 019/00 Digital computing or data processing equipment or methods, specially adapted for specific applications

Event Publications

6 November 2003 Complete Application Filed

  Priority application(s): 60/391,966 28.06.02 US

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2003256257

12 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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