MATERIAL EVAPORATION CHAMBER WITH DIFFERENTIAL VACUUM PUMPING

Details for Australian Patent Application No. 2003255682 (hide)

Owner RIBER

Inventors CHAIX, Catherine; JARRY, Alain; NUTTE, Pierre-Andre; LOCQUET, Jean-Pierre; FOMPEYRINE, Jean; SIEGWART, Heinz

Pub. Number AU-A-2003255682

PCT Number PCT/FR03/01868

PCT Pub. Number WO2003/106731

Priority 02/07501 18.06.02 FR

Filing date 18 June 2003

Wipo publication date 31 December 2003

International Classifications

C23C 014/24 Coating by vacuum evaporation, by sputtering or by ion implantation - Vacuum evaporation

C30B 023/02 Single-crystal growth from vapours - Epitaxial-layer growth

Event Publications

6 November 2003 Complete Application Filed

  Priority application(s): 02/07501 18.06.02 FR

26 February 2004 Application Open to Public Inspection

  Published as AU-A-2003255682

12 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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