MAINTENANCE SYSTEM, SUBSTRATE PROCESSING DEVICE, REMOTE OPERATION DEVICE, AND COMMUNICATION METHOD

Details for Australian Patent Application No. 2003254901 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors MORI, Takuya

Pub. Number AU-A-2003254901

PCT Number PCT/JP03/10156

PCT Pub. Number WO2004/021417

Priority 2002-247525 27.08.02 JP

Filing date 8 August 2003

Wipo publication date 19 March 2004

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

30 October 2003 Complete Application Filed

  Priority application(s): 2002-247525 27.08.02 JP

6 May 2004 Application Open to Public Inspection

  Published as AU-A-2003254901

12 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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