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Details for Australian Patent Application No. 2003254871 (hide)

Owner NOK CORPORATION

Inventors SHOJIMA, Daihachi

Pub. Number AU-A-2003254871

PCT Number PCT/JP03/10088

PCT Pub. Number WO2004/038781

Priority 2002-310663 25.10.02 JP

Filing date 7 August 2003

Wipo publication date 13 May 2004

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

30 October 2003 Complete Application Filed

  Priority application(s): 2002-310663 25.10.02 JP

17 June 2004 Application Open to Public Inspection

  Published as AU-A-2003254871

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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