ANISOTROPIC CONDUCTIVITY CONNECTOR, CONDUCTIVE PASTE COMPOSITION, PROBE MEMBER, WAFER INSPECTING DEVICE, AND WAFER INSPECTING METHOD

Details for Australian Patent Application No. 2003254854 (hide)

Owner JSR CORPORATION

Inventors KOKUBO, Terukazu; SENO, Koji; HARA, Takeo; SETAKA, Ryoji

Pub. Number AU-A-2003254854

PCT Number PCT/JP03/10056

PCT Pub. Number WO2004/015761

Priority 2002-232203 09.08.02 JP; 2002-232204 09.08.02 JP

Filing date 7 August 2003

Wipo publication date 25 February 2004

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

30 October 2003 Complete Application Filed

  Priority application(s): 2002-232203 09.08.02 JP; 2002-232204 09.08.02 JP

8 April 2004 Application Open to Public Inspection

  Published as AU-A-2003254854

5 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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2003254855-ANISOTROPIC CONDUCTIVITY CONNECTOR, PROBE MEMBER, WAFER INSPECTING DEVICE, AND WAFER INSPECTING METHOD

2003254853-ANISOTROPIC CONDUCTIVITY CONNECTOR, CONDUCTIVE PASTE COMPOSITION, PROBE MEMBER, WAFER INSPECTING DEVICE, AND WAFER INSPECTING METHOD