SEMICONDUCTOR MANUFACTURING EQUIPMENT

Details for Australian Patent Application No. 2003254827 (hide)

Owner NIUYA, Takayuki

Inventors NIUYA, Takayuki

Pub. Number AU-A-2003254827

PCT Number PCT/JP03/10010

PCT Pub. Number WO2005/015624

Filing date 6 August 2003

Wipo publication date 25 February 2005

International Classifications

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B08B 003/02 Cleaning by methods involving the use or presence of liquid or steam - Cleaning by the force of jets or sprays

Event Publications

30 October 2003 Complete Application Filed

7 April 2005 Application Open to Public Inspection

  Published as AU-A-2003254827

27 April 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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