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Details for Australian Patent Application No. 2003254785 (hide)

Owner SUMITOMO PRECISION PRODUCTS CO., LTD.

Inventors KIKUCHI, Tatsuo; YAMANAKA, Takeo; YAMAGUCHI, Yukitaka; KANAYAMA, Tokiko

Pub. Number AU-A-2003254785

PCT Number PCT/JP03/09702

PCT Pub. Number WO2004/013906

Priority 2002-250411 29.08.02 JP; 2002-227588 05.08.02 JP; 2002-250322 29.08.02 JP

Filing date 30 July 2003

Wipo publication date 23 February 2004

International Classifications

H01L 021/31 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

30 October 2003 Complete Application Filed

  Priority application(s): 2002-250411 29.08.02 JP; 2002-227588 05.08.02 JP; 2002-250322 29.08.02 JP

1 April 2004 Application Open to Public Inspection

  Published as AU-A-2003254785

5 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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