DEFECT REDUCTION IN SEMICONDUCTOR MATERIALS

Details for Australian Patent Application No. 2003254349 (hide)

Owner UNIVERSITY COLLEGE CORK - NATIONAL UNIVERSITY OF IRELAND, CORK

Inventors ROYCROFT, Brendan, John; MAASKANT, Pleun, Pieter

Pub. Number AU-A-2003254349

PCT Number PCT/EP03/07604

PCT Pub. Number WO2004/008509

Priority 2002/0574 11.07.02 IE

Filing date 11 July 2003

Wipo publication date 2 February 2004

International Classifications

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

30 October 2003 Complete Application Filed

  Priority application(s): 2002/0574 11.07.02 IE

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003254349

5 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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